Laser Logic State Imaging (LLSI)

2014 ◽  
Author(s):  
Baohua Niu ◽  
Grace Mei Ee Khoo ◽  
Yuan-Chuan Steven Chen ◽  
Fernando Chapman ◽  
Dan Bockelman ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Laser Scanning ◽  
Near Infrared ◽  
Continuous Wave ◽  
Process Development ◽  
Low Voltage ◽  
Signal To Noise Ratio ◽  
Fault Isolation ◽  
Cmos Process ◽  
Logic State

Abstract Logic State Imaging (LSI) using Infra-Red Emission Microscopy (IREM) [1-4] has been an indispensable technology for silicon CMOS process development and product debug applications. Its main limitations are relatively poor spatial resolution due to the broadband near-infrared photons emitted, and poor Signal to Noise Ratio (SNR) with low voltage and low leakage processes and products. Continuous-Wave Laser Scanning Microscope (CW-LSM) based Signal Imaging and Probing (CW-SIP) [5-9] technology is also widely used. It features inherently better spatial resolution than IREM, due to the use of monochromatic 1319nm or 1064nm laser light, and high SNR due to its weaker dependence on voltage and leakage, and, for signal imaging applications, the use of narrow band detection to reduce noise. However, CW-SIP can only detect modulating signals, so it couldn’t previously be applied to LSI. In this paper, we introduce an innovative approach that overcomes this limitation to enable Laser Logic State Imaging (LLSI). Actual fault isolation and design debug cases using this technology are presented to show its advantages in terms of resolution (>50% better), SNR (>2X better) and throughput time improvement, especially at low voltages (down to 500mV).

Asymmetric Data-Frequency Mapping and Multi Trigger-Probing for Improved Scan Debug

2018 ◽  
Author(s):  
Swaminathan ◽  
Anuradha ◽  
Abuayob ◽  
Eli ◽  
Konstantine Gitelmkher ◽  
...  
Keyword(s):  
Integrated Circuit ◽  
Laser Scanning ◽  
Continuous Wave ◽  
Signal To Noise Ratio ◽  
Fault Isolation ◽  
Laser Scanning Microscopy ◽  
Mapping Technique ◽  
Acquisition Time ◽  
Scan Chain ◽  
Continuous Wave Signal

Abstract Integrated-circuit device dimensions continue to shrink, enabling higher density of devices and smaller node size. A number of strategies to improve the resolution of failure analysis and fault isolation tools exist, but some of these techniques are reaching fundamental limits so that engineers are also challenged to innovative methods to increase the useful life of existing toolsets. Laser Scanning Microscopy including Laser Voltage Probing and frequency mapping struggle to maintain resolution commensurate with shrinking feature size. Here we present two methods to improve efficiency and capability of this toolset using existing optical hardware and configuration. The first method applies a frequency mapping technique using scan chain data patterns that allow for data manipulation. This enables an effective resolution increase through deconvolution of data collected in a sequence of scans completed on varied device states. A second method using multiple triggers per loop to evaluate a deterministic continuous wave signal is shown to reduce probe acquisition time, improve job throughput time, and enable, better signal-to-noise ratio for common scan chain debug workflow.

scholarly journals Photon-separation to enhance the spatial resolution in pulsed STED microscopy

2018 ◽  
Author(s):  
Giorgio Tortarolo ◽  
Yuansheng Sun ◽  
Kai-Wen Teng ◽  
Yuji Ishitsuka ◽  
Luca Lanzanó ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Continuous Wave ◽  
Spatial Information ◽  
Temporal Dynamics ◽  
Signal To Noise Ratio ◽  
Stimulated Emission ◽  
Beam Intensity ◽  
Resolution Limit ◽  
Sted Microscopy ◽  
Split Technique

AbstractStimulated emission depletion microscopy (STED) is one of the pivotal super-resolution techniques. It overcomes the spatial resolution limit imposed by the diffraction by using an additional laser beam, the STED beam, whose intensity is directly related to the achievable resolution. Despite achieving nanometer resolution, much effort in recent years has been devoted to reduce the STED beam intensity because it may lead to photo-damaging effects. Exploring the temporal dynamics of the detected fluorescence photons and accessing the encoded spatial information has proven to be a powerful strategy, and has contributed to the separation by lifetime tuning (SPLIT) technique. The SPLIT technique uses the phasor analysis to efficiently distinguish photons emitted from the center and the periphery of the excitation spot. It thus improves the resolution without increasing the STED beam intensity. This method was proposed for architectures based on STED beam running in continuous wave (CW-STED microscopy). Here, we extend it to architectures based on pulsed STED beam (pSTED microscopy). We show, through simulated and experimental data, that the SPLIT-pSTED method reduces the detection volume of the pSTED microscope without significantly reducing the signal-to-noise ratio of the final image, thus effectively improving the resolution without increasing the STED beam intensity.

Low-voltage EDS of magnesium ferrite Dendrites in a FEG-SEM

1996 ◽  
Vol 54 ◽  
pp. 478-479
Author(s):  
Matthew T. Johnson ◽  
Ian M. Anderson ◽  
Jim Bentley ◽  
C. Barry Carter
Keyword(s):  
Monte Carlo ◽  
Quantitative Analysis ◽  
Monte Carlo Simulations ◽  
Cross Section ◽  
Spatial Resolution ◽  
Low Voltage ◽  
Magnesium Ferrite ◽  
X Ray ◽  
Interaction Volume ◽  
Ferrite Spinel

Energy-dispersive X-ray spectrometry (EDS) performed at low (≤ 5 kV) accelerating voltages in the SEM has the potential for providing quantitative microanalytical information with a spatial resolution of ∼100 nm. In the present work, EDS analyses were performed on magnesium ferrite spinel [(MgxFe1−x)Fe2O4] dendrites embedded in a MgO matrix, as shown in Fig. 1. spatial resolution of X-ray microanalysis at conventional accelerating voltages is insufficient for the quantitative analysis of these dendrites, which have widths of the order of a few hundred nanometers, without deconvolution of contributions from the MgO matrix. However, Monte Carlo simulations indicate that the interaction volume for MgFe2O4 is ∼150 nm at 3 kV accelerating voltage and therefore sufficient to analyze the dendrites without matrix contributions.Single-crystal {001}-oriented MgO was reacted with hematite (Fe2O3) powder for 6 h at 1450°C in air and furnace cooled. The specimen was then cleaved to expose a clean cross-section suitable for microanalysis.

Urban energetics applications and Geomatic technologies in a Smart City perspective

2015 ◽  
Vol 6 (1) ◽  
pp. 19-29 ◽  
Author(s):  
G. Bitelli ◽  
P. Conte ◽  
T. Csoknyai ◽  
E. Mandanici
Keyword(s):  
Smart City ◽  
Laser Scanning ◽  
Near Infrared ◽  
Three Dimensional ◽  
Energy Sector ◽  
Primary Objective ◽  
Airborne Lidar ◽  
City Management ◽  
Urban Context ◽  
Research Areas

The management of an urban context in a Smart City perspective requires the development of innovative projects, with new applications in multidisciplinary research areas. They can be related to many aspects of city life and urban management: fuel consumption monitoring, energy efficiency issues, environment, social organization, traffic, urban transformations, etc. Geomatics, the modern discipline of gathering, storing, processing, and delivering digital spatially referenced information, can play a fundamental role in many of these areas, providing new efficient and productive methods for a precise mapping of different phenomena by traditional cartographic representation or by new methods of data visualization and manipulation (e.g. three-dimensional modelling, data fusion, etc.). The technologies involved are based on airborne or satellite remote sensing (in visible, near infrared, thermal bands), laser scanning, digital photogrammetry, satellite positioning and, first of all, appropriate sensor integration (online or offline). The aim of this work is to present and analyse some new opportunities offered by Geomatics technologies for a Smart City management, with a specific interest towards the energy sector related to buildings. Reducing consumption and CO2 emissions is a primary objective to be pursued for a sustainable development and, in this direction, an accurate knowledge of energy consumptions and waste for heating of single houses, blocks or districts is needed. A synoptic information regarding a city or a portion of a city can be acquired through sensors on board of airplanes or satellite platforms, operating in the thermal band. A problem to be investigated at the scale A problem to be investigated at the scale of the whole urban context is the Urban Heat Island (UHI), a phenomenon known and studied in the last decades. UHI is related not only to sensible heat released by anthropic activities, but also to land use variations and evapotranspiration reduction. The availability of thermal satellite sensors is fundamental to carry out multi-temporal studies in order to evaluate the dynamic behaviour of the UHI for a city. Working with a greater detail, districts or single buildings can be analysed by specifically designed airborne surveys. The activity has been recently carried out in the EnergyCity project, developed in the framework of the Central Europe programme established by UE. As demonstrated by the project, such data can be successfully integrated in a GIS storing all relevant data about buildings and energy supply, in order to create a powerful geospatial database for a Decision Support System assisting to reduce energy losses and CO2 emissions. Today, aerial thermal mapping could be furthermore integrated by terrestrial 3D surveys realized with Mobile Mapping Systems through multisensor platforms comprising thermal camera/s, laser scanning, GPS, inertial systems, etc. In this way the product can be a true 3D thermal model with good geometric properties, enlarging the possibilities in respect to conventional qualitative 2D images with simple colour palettes. Finally, some applications in the energy sector could benefit from the availability of a true 3D City Model, where the buildings are carefully described through three-dimensional elements. The processing of airborne LiDAR datasets for automated and semi-automated extraction of 3D buildings can provide such new generation of 3D city models.

Low Temperature Fault Isolation Using Soft Defect Localization

2012 ◽  
Author(s):  
Kristopher D. Staller
Keyword(s):  
Low Temperatures ◽  
Laser Scanning ◽  
Low Cost ◽  
Fault Isolation ◽  
Laser Scanning Microscopy ◽  
Cold Temperature ◽  
Multiple Point ◽  
Defect Localization ◽  
Low Levels

Abstract Cold temperature failures are often difficult to resolve, especially those at extreme low levels (< -40°C). Momentary application of chill spray can confirm the failure mode, but is impractical during photoemission microscopy (PEM), laser scanning microscopy (LSM), and multiple point microprobing. This paper will examine relatively low-cost cold temperature systems that can hold samples at steady state extreme low temperatures and describe a case study where a cold temperature stage was combined with LSM soft defect localization (SDL) to rapidly identify the cause of a complex cold temperature failure mechanism.

WLCSP Laminate Removal Using NIR Laser

2018 ◽  
Author(s):  
Chun Haur Khoo
Keyword(s):  
Near Infrared ◽  
Laser Energy ◽  
Photon Emission ◽  
Mechanical Damage ◽  
Consumer Products ◽  
Fault Isolation ◽  
Wafer Level ◽  
Isolation Technique ◽  
Laminate Layer ◽  
Nir Laser

Abstract Driven by the cost reduction and miniaturization, Wafer Level Chip Scale Packaging (WLCSP) has experienced significant growth mainly driven by mobile consumer products. Depending on the customers or manufacturing needs, the bare silicon backside of the WLCSP may be covered with a backside laminate layer. In the failure analysis lab, in order to perform the die level backside fault isolation technique using Photon Emission Microscope (PEM) or Laser Signal Injection Microscope (LSIM), the backside laminate layer needs to be removed. Most of the time, this is done using the mechanical polishing method. This paper outlines the backside laminate removal method of WLCSP using a near infrared (NIR) laser that produces laser energy in the 1,064 nm range. This method significantly reduces the sample preparation time and also reduces the risk of mechanical damage as there is no application of mechanical force. This is an effective method for WLCSP mounted on a PCB board.

Application of Novel Low Current OBIRCH Amplifier and Nanoprobing to Identify Subtle Leakages in Advanced Node Technologies

2018 ◽  
Author(s):  
Satish Kodali ◽  
Liangshan Chen ◽  
Yuting Wei ◽  
Tanya Schaeffer ◽  
Chong Khiam Oh
Keyword(s):  
Signal To Noise Ratio ◽  
Semiconductor Industry ◽  
Fault Isolation ◽  
Ring Oscillator ◽  
High Signal ◽  
The Novel ◽  
Resistance Change ◽  
Three Samples ◽  
Relative Threshold ◽  
First Time

Abstract Optical beam induced resistance change (OBIRCH) is a very well-adapted technique for static fault isolation in the semiconductor industry. Novel low current OBIRCH amplifier is used to facilitate safe test condition requirements for advanced nodes. This paper shows the differences between the earlier and novel generation OBIRCH amplifiers. Ring oscillator high standby leakage samples are analyzed using the novel generation amplifier. High signal to noise ratio at applied low bias and current levels on device under test are shown on various samples. Further, a metric to demonstrate the SNR to device performance is also discussed. OBIRCH analysis is performed on all the three samples for nanoprobing of, and physical characterization on, the leakage. The resulting spots were calibrated and classified. It is noted that the calibration metric can be successfully used for the first time to estimate the relative threshold voltage of individual transistors in advanced process nodes.

Combinational Logic Analysis Using Laser Voltage Probing

2015 ◽  
Author(s):  
Venkat Krishnan Ravikumar ◽  
Winson Lua ◽  
Seah Yi Xuan ◽  
Gopinath Ranganathan ◽  
Angeline Phoa
Keyword(s):  
Failure Analysis ◽  
Continuous Wave ◽  
Truth Table ◽  
Combinational Logic ◽  
Infra Red ◽  
Analysis Design ◽  
Logic State

Abstract Laser Voltage Probing (LVP) using continuous-wave near infra-red lasers are popular for failure analysis, design and test debug. LVP waveforms provide information on the logic state of the circuitry. This paper aims to explain the waveforms observed from combinational circuitries and use it to rebuild the truth table.

Analysis of 6T SRAM Cell in Different Technologies

2017 ◽  
Vol MCSP2017 (01) ◽  
pp. 7-10 ◽  
Author(s):  
Subhashree Rath ◽  
Siba Kumar Panda
Keyword(s):  
Low Power ◽  
Data Storage ◽  
Low Voltage ◽  
Random Access ◽  
Storage Device ◽  
Cmos Process ◽  
Process Technology ◽  
Digital Devices ◽  
Noise Margin ◽  
Sram Cell

Static random access memory (SRAM) is an important component of embedded cache memory of handheld digital devices. SRAM has become major data storage device due to its large storage density and less time to access. Exponential growth of low power digital devices has raised the demand of low voltage low power SRAM. This paper presents design and implementation of 6T SRAM cell in 180 nm, 90 nm and 45 nm standard CMOS process technology. The simulation has been done in Cadence Virtuoso environment. The performance analysis of SRAM cell has been evaluated in terms of delay, power and static noise margin (SNM).

scholarly journals Line observations of the 30-Dor complex and N159A5 with the MPE imaging NIR spectrometer FAST

1991 ◽  
Vol 148 ◽  
pp. 205-206 ◽  
Author(s):  
A. Krabbe ◽  
J. Storey ◽  
V. Rotaciuc ◽  
S. Drapatz ◽  
R. Genzel
Keyword(s):  
Spatial Resolution ◽  
Molecular Hydrogen ◽  
Near Infrared ◽  
Large Magellanic Cloud ◽  
Magellanic Cloud ◽  
Emission Lines ◽  
Resolving Power ◽  
Max Planck ◽  
First Time ◽  
Infrared Array

Images with subarcsec spatial resolution in the light of near-infrared atomic (Bry) and molecular hydrogen H2 (S(1) v=1-0) emission lines were obtained for some extended, pointlike objects in the Large Magellanic Cloud (LMC) for the first time. We used the Max-Planck-Institut für extraterrestrische Physik (MPE) near-infrared array spectrometer FAST (image scale 0.8”/pix, spectral resolving power 950) at the ESO/MPI 2.2m telescope, La Silla. We present some results on the 30-Dor complex and N159A5.

Sign in / Sign up

Export Citation Format

Share Document